Micromachined Microphone Array on a Chip for Turbulent Boundary Layer Measurements.

Krause, Joshua.

Abstract: A surface micromachined microphone array on a single chip has been successfully designed, fabricated, characterized, and tested for aeroacoustic purposes. The microphone was designed to have venting through the diaphragm, 64 elements (8×8) on the chip, and used a capacitive transduction scheme. The microphone was fabricated using the MEMSCAP PolyMUMPs process (a foundry polysilicon surfa... read more

Tufts University. Department of Mechanical Engineering.
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ID: tufts:20895
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